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Photoresists, Ancillaries,
Etchants, Solvents, and Technical Support
for all Stages of
MicroStructuring and
Lithography
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Photoresists
Developers
Remover/Stripper
Thinner/EBR
Adhesion Promotion
Etchants
Etching Mixtures
Solvents
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MIC Developers (metal-ion containing)
AZ® Developer
(MIC)
AZ® Developer (MIC) is optimized for minimum Al attack.
It is typically applied 1:1 diluted in DI-H2O for high
contrast, or undiluted for a high development rate. The
dark erosion of AZ® Developer is slightly higher as
compared to other developers.
AZ® Developer can be used in combination with most
families of AZ Photoresists (i.e. AZ 1500, AZ 6600
and AZ 4500).
It is designed to meet the demanding microlithographic
and processing requirements of the semiconductor
industry and tuned to lowest attack of aluminium. It is
an odourless, aqueous, inorganic, alkaline solution,
which is compatible with batch and in-line developing
processes. Precise manufacture and stringent quality
control ensure batch-to-batch reproducibility and
product quality.
AZ Developer is supplied as a concentrate. The standard
high-contrast make-up provides superior resolution and
contrast as well as broad processing latitude. Use of
the concentrated AZ Developer as a high-speed make-up
results in very high production throughput. AZ®
Developer displays the lowest aluminium etch rate of all
AZ Deveoper-types and is ideal for metal levels.
For further information refer AZ
Developer.pdf
AZ® 351B
(MIC)
AZ® 351B (MIC) is based on buffered NaOH and
typically used in 1:4 dilution.
For further information refer AZ 351B
(MIC).pdf
AZ® 400K
(MIC)
AZ® 400K (MIC) is based on buffered KOH and typically
used in 1:4 dilution.
For further information refer AZ 400K
(MIC).pdf
AZ® 303 (MIC)
AZ® 303 (MIC) is based on KOH and NaOH and designed for
the resist AZ® 111 XFS.
The next selection characteristics is the compatibility
of the developer to a certain
photoresist or/and a certain substrate material (table
overleaf, bottom).
For further information refer AZ
303 (MIC).pdf
®AZ, the AZ logo, BARLi , Aquatar and Kallista are
registered trademarks of AZ Electronic Materials.
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