Etching Mixtures
Aluminium Etchant
(H3PO4/HNO3/CH3COOH)
Mixtures of nitric acid (→ Al oxidation to Al2O3), phosphoric
acid (→ solving the Al2O3 formed), and optionally acetic acid
(→ wetting agent and buffer for HNO3)
For further information refer Aluminium
Etchant.pdf
Chromium Etchant N°1
((NH4)2[Ce(NO3)6]/HClO4)
Mixtures of perchloric acid and ceric ammonium nitrate
For further information refer Chromium
Etchant.pdf
Gold Etchant NFE
50-10-40 (HNO3/HF based)
Our standard gold etchant consists of nitric acid and
hydrofluoric acid. We sell it in VLSI quality in 2.5
liter bottles.
For further information refer Gold
Etchant.pdf
Silicon Etchant AFN
5-4-9 (HF/HNO3/CH3COOH)
Mixtures of nitric acid (→ oxidation of Si to SiO2),
hydrofluoric acid (→ SiO2 etching), and acetic acid (→ wetting agent and buffer for HNO3).
For further information refer Silicon
Etchant.pdf
Buffered Oxide Etch, BOE 7:1 (Ammoniumfluoride Etching Solution 87.5:12.5 or Buffered Hydrofluoric Acid)
Used for etching of SiO2. Due to the higher PH value in contrast to unbuffered HF it gives better results in combination with photoresists.
The etch rate on SiO2 is (depending on temperature and SiO2 morphology) in the range of 70-90 nm per minute.
For further information refer: Buffered Oxide Etch.pdf
Sales Volumes, Shipping and Pricing
As listed in the previous section, we supply our etchants in e.
g. 1.0 L, 2.5 L or 5.0 L sales units. Beside single bottles, we also
offer cardboxes of 6 x 1.0 L, 6 x 2.5 L or 4 x 5.0 L.
Our typical lead time is 3-5 working days within Germany, lead times
to other countries on request. On demand, in urgent cases our
etchants can be shipped within 24 hours within Germany.
Please send your request to:
e-mail: sales@microchemicals.com
phone: +49 (0)731 36080 409
fax: +49 (0)731 36080 908
Thank you very much for your interest!
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