AZ 1500 Series Photoresists
This photoresist - series consists of several
different types. They are derived from well known AZ®
1300- and AZ® 1400-series and reflect the replacement of
former cellosolve-acetate based types by safer solvent
versions made up with PGMEA as
solvent.
Photoresist AZ 1514 H
Photoresist AZ® 1514 H is the safer solvent substitute
for AZ® 1350 H
For further information refer Photoresist
AZ1500-series.pdf
Photoresist AZ 1505 and AZ 1518
Photoresist AZ® 1505 and Photoresist AZ® 1518 are
different viscosities (for different film thicknesses)
of former AZ® 1350J/AZ1450J. They are intended for
general applications where photospeed is not of major
concern.
For further information refer Photoresist
AZ1500-series.pdf
Photoreist AZ 1512 HS and AZ 1518 HS
Photoresist AZ® 1512 HS and Photoresist AZ® 1518 HS have
been added in 1990 to fulfil the demand for higher
photo-speed and at the same time improve adhesion for
wet-etching. They are used on broadband exposure
equipment like scanning projection aligners and
UT-steppers.
For further information refer Photoresist
AZ1500-series.pdf
®AZ, the AZ logo, BARLi , Aquatar and
Kallista are registered trademarks of AZ Electronic
Materials.
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