AZ 520D - Protective Coating
AZ 520D
AZ® PC 520 D is a cost-effective coating for the
protection of device surfaces during operations such as
back-lap or backside etch.
It is based on Novolak resin, has a blue colour for easy
inspection and is resistant to most etchants. The thickness of
this coating is 2.0 µm at 4000 rpm spin speed.
Please note, that the protective coating AZ 520D is not stable in KOH-etches typically used for silicon etching.
In the datasheet there is a reference to a product AZ 546D this product was dicontinued in 2005 and is therefore no longer available.
For further information refer AZ
520_D PC.pdf
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Materials.
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