Spray Coating Photoresists
AZ
4999 (Datasheet
as PDF)
TI Spray (Datasheet
as PDF)
AZ 4999
Film thickness: 0.5 ... 20 µm (depending on spray coating conditions)
UV-sensitivity: i-, h-, g-line (310-440nm)
Sales volumes: 250ml, 500ml, 1L, 2.5L und 5 Liter
General Information
AZ® 4999 is a spray coating dedicated
highly transparent photoresist tailored to excel on
special spray coating equipment (e.g. SUSS Delta
AltaSpray) where it provides defect free and conformal
coatings on devices with severe topography.
Thick (several to several tens of microns) and uniform
resist coatings are obtained on topography such as
V-grooves and trenches with optimum coverage of sharp
edges.
There is no accumulation of resist in trenches. The use
of AZ® 4999 photoresist enables high
reproducibility in volume production applications.
For further information refer Photoresist
AZ 4999.pdf
Development
AZ® 400K Developer, AZ® 826 MIF Developer recommended; AZ® 351B possible
TI Spray
Film thickness: 0.5 ... 5 µm
UV-sensitivity: i-, h-, g-line (310-440nm)
Sales volumes: 250ml, 500ml, 1L, 2.5L und 5 Liter
General Information
The TI Spray Photoresist is specially designed
for the application in the so called “image reversal
technology” for:
- subsequent lift-off of deposited layers
- wet chemical treatment in HF containing etching
solutions
- direct mesa grooving.
The viscosity enables a direct use in spray coating
equipment for a target thickness of 1 to 10 µm. The
typical aspect ratio of the structured features
achievable is in the range of 1.6 .. 2.0.
This technical data sheet intends to give you a
guide-line for process parameters for various
applications. However, the optimum values for e.g.
exposure dose, or development depend on the individual
equipment and need to be adjusted on each individual
demand.
Development
AZ® 400K Developer, AZ® 826 MIF Developer recommended; AZ® 351B possible
For further information refer Photoresist
MicroChemicals TI Spray
®AZ, the AZ logo, BARLi , Aquatar and
Kallista are registered trademarks of AZ Electronic
Materials.
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