Phosphoric Acid

H3PO4

Available Purity Grades and Concentration

We supply nitrric acid (85 %) in VLSI-quality, which is the usual purity grades applied in semiconductor processing and micro-electronics. The specifications of our phosphoric acid are listed in the technical datasheet below.

Typical Fields of Application of Phosphoric Acid

H3PO4 mixed with HNO3 is an ingredient of many etching mixtures for e. g. Aluminium and many other metals.

Technical Data Sheet:

For further information please refer to the technical data sheet:
> Phosphoric Acid (SPEC)
>
Wet Etching

 

Lithography Application Notes

Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes

Sales Volumes, Purity Grade and Shipping

Available Sales Units:

  • Bottles á 2.5 L (1 PU = 6 x 2,5 liters or single bottles)
  • 5 L, 30 L or 200 L drums on request

Available Purity Grade:

  • VLSI

Our typical lead time is 1-3 working days within Germany, lead times to other countries on request. On demand, in urgent cases our etchants can be shipped within 24 hours to a destination inside Germany.

Please send us your request.

e-mail: sales(at)microchemicals.com
phone: +49 (0)731 977 343 0
fax: +49 (0)731 977 343 29

Thank you very much for your interest!

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