TMAH 25 %

Tetramethylammonium hydroxide

Available Purity Grades and Concentration

We supply TMAH (25 %) in VLSI-quality, which is the usual purity grades applied in semiconductor processing and micro-electronics. The specifications of our TMAH are listed in the technical data sheet below.

Typical Fields of Application of TMAH

TMAH is mainly used for anisotropic silicon etching when metal ion free processing is required.

Technical Data Sheet:

For further information please refer to the technical data sheet:
> TMAH (SPEC)
> Wet Etching

 

Lithography Application Notes

Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes

Sales Volumes, Purity Grade and Shipping

Available Sales Units:

  • Bottles á 2.5 L (1 PU = 6 x 2,5 liters or single bottles)
  • 5 L, 30 L or 200 L drums on request

Available Purity Grade:

  • VLSI

Our typical lead time is 1-3 working days within Germany, lead times to other countries on request. On demand, in urgent cases our etchants can be shipped within 24 hours to a destination inside Germany.

Please send us your request.

e-mail: sales(at)microchemicals.com
phone: +49 (0)731 977 343 0
fax: +49 (0)731 977 343 29

Thank you very much for your interest!

®AZ, the AZ Logo, BARLi and Aquatar are registered trademarks of Merck Performance Materials GmbH.