AZ 520D - Protective Coating
Thickness Range and Exposure
Film thickness: 1.5 ... 3.0 µm
Sales volumes: 250 ml, 500 ml, 1.000 ml, 2500 ml und 5 Liter
AZ® PC 520 D is a cost-effective coating for the protection of device surfaces during operations such as back-lap or backside etch.It is based on Novolak resin, has a blue colour for easy inspection and is resistant to most etchants. The thickness of this coating is 2.0 µm at 4000 rpm spin speed.
Please note, that the protective coating AZ 520D is not stable in KOH-etches typically used for silicon etching.
In the datasheet there is a reference to a product AZ 546D this product was dicontinued in 2005 and is therefore no longer available.
For further information refer AZ 520_D PC.pdf
Lithography Application Notes
Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here: application notes.