NMP

1-methyl-2-pyrrolidone

Available Purity Grades of NMP

We supply NMP in ULSI-quality as typically used in the fields of semiconductor processing and micro-electronics. The specifications of both qualities are listed in the technical data sheet below.

Typical Fields of Application of NMP

NMP is a powerful lift-off medium due to its physical properties: NMP yields a low vapour pressure (no striation formation), strongly solves organic impurities as well as resists, keeps solved particles in solution, and can be heated up to 80°C due to its high boiling point. For the same reasons, NMP (pure or diluted in H2O) gives a very well-suited stripper for photoresists processed under harsh conditions.

Substitute for NMP?

Due to the toxicity of NMP and its position of the SVHC-list (REACH), the long-term availability of NMP can not be guaranteed. Therefore, we strongly recommend to consider alternative substances.

For non cross-linked resist films the AZ® 100 Remover, DMSO or other common organic solvents cab be used as stripper. If the resist film is crosslinked (e. g. by high temperature steps > 140°C, during plasma processes such as dry etching, or during ion implantation), we recommend the NMP-free, nontoxic TechniStrip P1316 or TechniStrip NI555 as remover.

Technical Data Sheet:

For further information please refer to the technical data sheet:
> NMP (SPEC)
> Solvents: Theory and Application

 

Lithography Application Notes

Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes

Sales Volumes, Purity Grade and Shipping

Available Sales Units:

  • Bottles á 2.5 L (1 PU = 6 x 2,5 liters or single bottles)
  • Bottles á 5 L (1 PU = 4 x 5 liters or single bottles)
  • 30 L or 200 L drums on request

Available Purity Grade:

  • ULSI

Our typical lead time is 1-3 working days within Germany, lead times to other countries on request. On demand, in urgent cases our etchants can be shipped within 24 hours to a destination inside Germany.

Please send us your request.

e-mail: sales(at)microchemicals.com
phone: +49 (0)731 977 343 0
fax: +49 (0)731 977 343 29

Thank you very much for your interest!

Physical Properties of NMP:

Density
Melting point
Boiling point
Flash point
Vapour pressure @ 20°C

1.03 g/cm3
-24°C
203°C
91°C
0.32 hPa

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