TechniEtch™SO102

TEOS Etchant

General Information

Tetraethylorothosilicate (TEOS) etch solution which contains special additives for excellent wetting capability, dispersing and etch rate control.

SO102 (A) standard AF HF etchant, B) SO102)

Technical Data Sheet:

For further information please refer to the technical data sheet:
> TechniEtch SO 102 (SPEC)
>
Wet Etching
> Wet etching metals

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Lithography Application Notes

Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes

Sales Volumes, Purity Grade and Shipping

Available Sales Units:

  • Bottles á 5 L (1 PU = 4 x 5 liters or single bottles)
  • 30 L or 200 L drums on request

Available Purity Grade:

  • VLSI

Our typical lead time is 1-3 working days within Germany, lead times to other countries on request. On demand, in urgent cases our etchants can be shipped within 24 hours to a destination inside Germany.

Please send us your request.

e-mail: sales(at)microchemicals.com
phone: +49 (0)731 977 343 0
fax: +49 (0)731 977 343 29

Thank you very much for your interest!

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