! IMPORTANT NOTICE ABOUT AZ AQUATAR VIII-A 45 !
We would like to inform you about a change regarding the product AZ Aquatar VIII-A 45 from Merck. The change concerns an additive which was changed to a similar one of another raw material supplier. The transition time, where we have been able to still supply the “old” AZ Aquatar VIII-A 45 comes now to an end and starting in March 2020 we will supply the “new” AZ Aquatar VIII-A 45 instead of the “old” one.
If you have not yet received a sample of the new anti-reflection coating, please feel free to contact us.
> Technical data package for AZ® Aquatar VIII A45
Thank's for understanding!
The AZ Aquatar has been discontinued. The alternative products are:
> AZ Aquatar VIII-A 45
> AZ Aquatar VIII-A 30
AZ Aquatar-VIII A45 and -VIII A30
(TARC)
General Information
AZ Aquatar®-VIII A45 and -VIII A30 is a top layer anti-reflective coating for use with g- and i-line. AZ Aquatar®-VIII A45 and -VIII A30 acts like an optical coating at the interface photoresist/air and improves image contrast.
Multiple reflections within the photoresist are also suppressed, the result is generally a reduction of the amplitude of the swing curve to 1/3rd. Application is very simple: it is just spun on top of the photoresist, no additional bake cycle is required and the standard development cycle removes it.
This simple process reduces linewidth variation over topography significantly, however does not suppress reflective notching.
Technical Data Sheet:
For further information please refer to the technical data sheet:
> AZ Aquatar TARC (TDS)
> AZ Aquatar (TDS)
> AZ Aquatar (Info)