Chemically Amplified Positive Tone Photoresists
AZ® 12XT-20PL-10 is a chemically amplified thick positive resist characterized by its excellent environmental stability and suitability for plating and RIE etc applications. Even for very high resist film thickness, AZ® 12XT-20PL-10 requires only short softbake times, no delay for rehydration, very small exposure doses due to its chemical amplification and reveals a high development rate.
Sales volumes: 100 ml, 250 ml, 500 ml, 1000 ml, 2,5 L and 3,78 L bottles
Technical Data Sheet:
For further information please refer to the Technical Datasheet:
> AZ® 12XT (TDS)