Ordyl SY 300

Dry Film

General Information

Ordyl® SY 300 is a specially for MEMS application developed, biocompatible, permanent (permanently remaining on the substrate after structuring), i-line sensitive dry film with a very high possible aspect ratio and excellent high thermal and chemical stability.
This dry film is available in thicknesses of 10 μm (0.4 mills), 20 μm (0.8 mills), 30 μm (1.2 mills), 55 μm (2.2 mills) and 125 μm (5.0 mills) for the substrate materials glass, silicon, Kapton and Mylar. The lamination takes place at 105 - 125 ° C and a pressure of 2.5 - 3.5 bar at a speed of approx. 1 - 3 meters per minute.
Ordyl® SY 300 is exposed at wavelengths close to i-line (360 - 380 nm) with exposure doses of approx. 100 - 400 mJ / cm2 (depending on the film thickness and the desired resist profile). A post exposure bake is not necessary, but a hard bake after developing at 150°C.
Development takes place with Ordyl® SY Developer in immersion, puddle or spray process, followed by rinsing with Ordyl SY Rinse for a residue-free substrate surface.

Main Features:

  • Excellent chemical resistance
  • Biocompatibility

Typical Application:

  • MEMS
  • Sealing application

Available Thickness:

  • 10 μm (0.4 mils), 20 μm (0.8 mils), 30 μm (1.2 mils), 55 μm (2.2 mils) and 125 μm (5 mils)
  • Different thickness available on request.

Developers

Development takes place with aqueous Na2CO3 or K2CO3 solutions or developers optimized for this dry film, followed by a subsequent rinse with DI water hardened with 250 mg/l Magnesium Sulfate. For developing the dry film Ordyl® SY 300 we recommend the developer Ordyl® SY 300.

Removers and Strippers

Resist removal takes place with KOH- or NaOH-solutions (each approx. 1 - 3% at 40 - 60°C) or strippers optimized for this dry film, such as the Ordyl® Stripper 5600 and TechniStrip NF26.

Technical Data Sheet

For further information please refer to the technical data sheet:
> Ordyl SY 300 (TDS)

 

Lithography Application Notes

Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes

Sales Volumes, Purity Grade and Shipping

Available Sales Units:

  • on request

Our typical lead time is 1-3 working days within Germany, lead times to other countries on request. On demand, in urgent cases our etchants can be shipped within 24 hours to a destination inside Germany.

Please send us your request.

e-mail: sales(at)microchemicals.com
phone: +49 (0)731 977 343 0
fax: +49 (0)731 977 343 29

Thank you very much for your interest!




These images of Ordyl® SY 300 resist structures in different magnification show the potenzial of very high aspect ratios. Images with kind permission from the data sheets of the manufacturer Elga Europe.