Equipment-Cleaner TE1 (A-20-B5) is a water-based intelligent fluid® (IF), which can easily remove g-line, i-line, DUV-, BARC- or other resists, as well as PMMA and PI isolators from equipment, such as catch cups, resist and outlet tubes.
The Equipment-Cleaner TE1 with its highly dynamic phase structures works in two steps:● infiltration and fragmentation of the layer● wrapping and removal of fragments
The Equipment-Cleaner TE1 suitable for a variety of different surfaces, for example steel, glass, ceramics, silicone and different plastic materials made of
polystyrene (PS) or polycarbonate (PC).
● not flammable (high flash point)
● no ATEX equipment necessary
● large application range
● longer durability of cleaning bath at constant viscosity
● pH neutral to the skin (pH: 5.5 – 6.5)
● no corrosion
● no etching
● no damage of fluoropolymer-substrates
Temperature range between 20 °C to 50 °C.
Soaking of catch cups or other parts in an IF-containing bath with vivid bath-agitation. The IF should not be diluted with water or alcohol! This will destroy its dynamic phase structures.
Soaking times from 1 to 8 hours. Afterwards put the equipment parts into a tempered container with fresh fluid.
Thoroughly rinse with water. Warm water accelerates the process.
Equipment-Cleaner TE1 has a shelf-life of not less than one year from the date of delivery. The intelligent fluid® should not be diluted, this destroys its dynamic phase structures and influences its properties. Optimal process conditions have to be determined individually. Contact our F&E-department for recommendations.
Store in original container only. Please test the material compatibility of the product in an inconspicuous area. Due to the multitude of different materials, especially plastics, incompatibilities can not completely be eliminated.
Please follow the instructions in the material safety data sheet for proper use, storage and disposal. The information given here are up to date. All data are subject to change in the future without prior notice.
Technical Data Sheet:
Please be advised that some data sheets are password protected and you need to sign up to get the account data. > Sign up
Lithography Application Notes
Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes
Sales Volumes, Purity Grade and Shipping
Available Sales Units:
- Bottles á 5 L (1 PU = 4 x 5 liters or single bottles)
- 30 L or 200 L drums on request
Available Purity Grade:
Our typical lead time is 1-3 working days within Germany, lead times to other countries on request. On demand, in urgent cases our etchants can be shipped within 24 hours to a destination inside Germany.
Please send us your request.
phone: +49 (0)731 977 343 0
fax: +49 (0)731 977 343 29