Methyl Isobuthyl Ketone
Available Purity Grades of MIBK
We supply MIBK in VLSI-quality as is typically used in the fields of semiconductor processing and micro-electronics. The specifications of both qualities are listed hin the technical data sheet below.
Typical Fields of Application of MIBK
MIBK is a solvent with a boiling point of 116°C. In the microelectronics it is sometimes used as a developer for e-beam resists. Synonyms for this solvent are: isobuthylketone and "4-methylpetane-2-on".
Technical Data Sheet:
Lithography Application Notes
Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes