Methyl Isobuthyl Ketone

Available Purity Grades of MIBK

We supply MIBK in VLSI-quality as is typically used in the fields of semiconductor processing and micro-electronics. The specifications of both qualities are listed hin the technical data sheet below.

Typical Fields of Application of MIBK

MIBK is a solvent with a boiling point of 116°C. In the microelectronics it is sometimes used as a developer for e-beam resists. Synonyms for this solvent are: isobuthylketone and "4-methylpetane-2-on".

Technical Data Sheet:

For further information please refer to the technical data sheet:
> Solvents: Theory and Application


Lithography Application Notes

Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here:
> application notes

Physical Properties of MIBK:

Melting point
Boiling point
Flash point
Vapour pressure @ 20°C

0.80 g/cm3
19 hPa

®AZ, the AZ Logo, BARLi and Aquatar are registered trademarks of Merck Performance Materials GmbH.