The TI PRIME adhesion promoter improves resist adhesion on substrates such as Si or glass. TI Prime contains Titanium, for this reason TI Prime should not be used where a contamination with Titanium could be a problem.
In contrast to HMDS, TI Prime is applied via spincoating, where a sub-mono layer is adsorbed onto the surface. In a subsequent ... the surface is activated. After cooling down the fusion should be applied.
Processing the TI PRIME
Lithography Application Notes
Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here: application notes.