AZ® IPS-6090

Outstanding Properties:

The IPS 6000 Series is a Series of positive photoresists with enhanced thermal and chemical resistance. It has been developed for use as patterning in semiconductors advanced packaging application (3DIC/TSV, CU Pillar, WLCSP, MEMS):

• very high resolution
• high aspect ratio
• low exposure dose for the thickness of the film
• straight pattern profile and footing free
• i-line and broandbend sensitive

It has a broad range of application such as:

• electro chemical deposition / plating of Cu RDL in WLCSP process
• electro chemical deposition / plating of Cu, Ni, Sn, SnAg, Au for 3DIC, FO and Flipchip processing
• Sacrificial layer for Si etching process in TSV
• Sacrificial layer for SiO₂ or SiN etching process in CMOS sensor processing

Sales volumes: 100 ml, 250 ml, 500 ml, 1000 ml, 2,5 L and 3,78 L bottles
Shelf Life: Overview critical shelf lifes

Suited Developers for the AZ^_® IPS 6000 Series:

We recommend AZ^_® 326 MIF Developer or AZ^_® 726 MIF Developer (this one contains surfactants)

Recommended Removers for the AZ^_® IPS 6000 Resists:

For non cross-linked resist films the AZ^_® 100 Remover, DMSO or other common organic solvents cab can be used as stripper. If the resist film is crosslinked (e.g. by high temperature steps >140° C, during plasma processes such as dry etching, or during ion implantation), we recommend the NMP-free TechniStrip P1316 as Remover or the TechniStrip P1331.

Technical Data Sheet:

For further information please refer to the technical data sheet:
> AZ^_® IPS 6000 (TDS)