Application Notes
Application Notes (engl.) as PDF
Wafer
Silicon Wafers: Production and Specification
Oxidation and Coating of Silicon Wafers
Quartz Wafers: Crystallography, Production and Specification
Photoresist Processing
Composition and Properties of Photoresists
Storage, Ageing and Handling of Photoresists
Selection Criteria of Photoresists
Substrate Pretreatment: Cleaning and Adhesion Promotion
Optical Parameters of Photoresists
Anti-Reflective-Coatings: TARC and BARC
Hardbake, Reflow und DUV-Hardening