AZ® EBR Solvent
AZ® EBR Solvent is a solvent (PGMEA) for dilution and edge-bead removal of AZ®-Photoresists.
Two different names existed for the same product: AZ® 1500 Thinner and AZ® PG Thinner.
Meanwhile both names have been replaced by the new single designation AZ® ERB Solvent (edge bead remover).
For further information please refer to AZ EBRs.pdf
Lithography Application Notes
Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here: application notes.