AZ® EBR Solvent

AZ® EBR Solvent is a solvent (PGMEA) for dilution and edge-bead removal of AZ®-Photoresists.

Two different names existed for the same product: AZ® 1500 Thinner and AZ® PG Thinner.

Meanwhile both names have been replaced by the new single designation AZ® ERB Solvent (edge bead remover).

For further information please refer to AZ EBRs.pdf

Lithography Application Notes

Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here: application notes.

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