Our Book Photolithography 2017

We have great news.
The last few months we have been working on a new edition of our brochures. For the first time, we have compiled all themes about photolithography in one softcover book. All contents and information of the previous edition have been revised, updated and renewed.

If you are interested in further copies for your colleagues, just fill in the form below. (Please keep your customer number ready for use.)

Book Order

With this book, we would like to give you comprehensive, application-oriented know-how on wafers, photo chemicals and the structuring steps carried out with these. Theoretical basics are dealt with only to the extent as they are helpful for the understanding of the relationships between the process parameters. This keeps the focus on the description and explanation of practical examples.
We unfortunately cannot (always) give you ready-to-use recipes with guaranteed success on the way into the clean room. Rather, in the following chapters, our main objective is to provide you with all the necessary understanding for the planning, realisation and optimisation of your lithographic processes in all sub-steps with a minimum of time.

Wishing you much success,

Your MicroChemicals

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Photolithografy – Basics of Microstructuring
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Photolithographie - Basics of Microstructuring
(not available as PDF)