AZ EBR 70/30
AZ® EBR 70/30 is more verstile as ist use is not only resticted to edge bead removal of Photoresist, but it is also effective for use with AZ Aquatar and AZ BARLi-II. So these Antireflective Coatings may be processed in the same track.
For further information refer AZ EBRs.pdf
And additional informations to AZ EBR Solvent find here: Application Note AZ EBR 70/30.pdf
Lithography Application Notes
Our list of application notes with litho-related theoretical and technical background on all stages of micro-structuring can be downloaded from here: application notes.