MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 07.11.2024 12:47 MEZ)
3 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)
| Qual. | Material | Size (inch) | Orien- tation | Polished | Thick- ness (μm) | Doping | Resistivity (ohm cm) | Coating | # available now1/soon2 | Article Number (WebShop) | |
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| Prime | Si + Si3N4 | 3 | (100) | double-side | 381 ± 25 | Boron | 1 - 10 | 50 nm | 22 / 22 | WNA30381250B1314S051 | | | | Prime Si + Si3N4 wafer 3 inch, thickness = 381 ± 25 μm, (100), 2-side polished, p-type (Boron), 1 - 10 Ohm cm, 50 nm LPCVD Si3N4 on both sides | | | Price/wafer (net): € 38.80 (5 wafers), € 34.00 (10 wafers), € 29.00 (25 wafers), € 27.50 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 3 | (100) | double-side | 381 ± 25 | Boron | 1 - 10 | 150 nm | 18 / 18 | WNA30381250B1314S151 | | | | Prime Si + Si3N4 wafer 3 inch, thickness = 381 ± 25 μm, (100), 2-side polished, p-type (Boron), 1 - 10 Ohm cm, 150 nm LPCVD Si3N4 on both sides | | | Price/wafer (net): € 44.00 (5 wafers), € 39.00 (10 wafers), € 34.00 (25 wafers), € 33.00 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 3 | (100) | double-side | 381 ± 25 | Boron | 1 - 10 | 500 nm | 24 / 24 | WNA30381250B1314S501 | | | | Prime Si + Si3N4 wafer 3 inch, thickness = 381 ± 25 μm, (100), 2-side polished, p-type (Boron), 1 - 10 Ohm cm, 500 nm PECVD Si3N4 on one side | | | Price/wafer (net): € 57.80 (5 wafers), € 53.00 (10 wafers), € 48.00 (25 wafers), € 45.00 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 3 | (100) | double-side | 381 ± 25 | Boron | 1 - 10 | 500 nm | 15 / 15 | WNA30381250B1314S502 | | | | Prime Si + Si3N4 (low-stress) wafer 3 inch, thickness = 381 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 500 nm low-stress Si3N4 | | | Price/wafer (net): € 57.80 (5 wafers), € 53.00 (10 wafers), € 48.00 (25 wafers), € 47.00 (50 wafers), € 46.00 (100 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 3 | (100) | double-side | 381 ± 25 | Boron | 1 - 10 | 1000 nm | 19 / 19 | WNA30381250B1314SXX2 | | | | Prime Si + Si3N4 (low-stress) wafer 3 inch, thickness = 381 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm low-stress Si3N4 | | | Price/wafer (net): € 73.80 (5 wafers), € 69.00 (10 wafers), € 64.00 (25 wafers), € 62.50 (50 wafers), € 61.00 (100 wafers) (plus packaging / shipping) | |
Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com
1 available when this list has been revised 2 available + ordered (= available in typically few weeks) 3 Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes. 4 prices subject to change; while stocks last. 5 possibly available on demand within approx. 1 - 2 weeks. We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.
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