MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 2025-02-19 13:20 MEZ)
Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.com
1 Inch | 2 Inch | 3 Inch | 4 Inch | 5 Inch | 6 Inch | 8 Inch | 12 Inch | Stücke | |
---|---|---|---|---|---|---|---|---|---|
CZ-Si | 3759 Wafer | 11757 Wafer | 14216 Wafer | 20603 Wafer | 667 Wafer | 15331 Wafer | 6662 Wafer | 773 Wafer | 2479 Wafer |
FZ-Si | 0 Wafer | 951 Wafer | 661 Wafer | 2883 Wafer | 0 Wafer | 600 Wafer | 0 Wafer | 0 Wafer | 0 Wafer |
Si+SiO2 | 1499 Wafer | 1439 Wafer | 1062 Wafer | 4067 Wafer | 0 Wafer | 353 Wafer | 0 Wafer | 0 Wafer | 1427 Wafer |
Si+SiNx | 0 Wafer | 0 Wafer | 93 Wafer | 563 Wafer | 0 Wafer | 0 Wafer | 0 Wafer | 0 Wafer | 0 Wafer |
Quartz | 150 Wafer | 117 Wafer | 136 Wafer | 289 Wafer | 0 Wafer | 0 Wafer | 0 Wafer | 0 Wafer | 124 Wafer |
Fused Silica | 1560 Wafer | 3976 Wafer | 776 Wafer | 1822 Wafer | 0 Wafer | 409 Wafer | 14 Wafer | 0 Wafer | 21687 Wafer |
Glass | 200 Wafer | 993 Wafer | 611 Wafer | 2275 Wafer | 0 Wafer | 517 Wafer | 53 Wafer | 0 Wafer | 2756 Wafer |
4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)
Qual. | Material | Size (inch) | Orien- tation | Polished | Thick- ness (μm) | Doping | Resistivity (ohm cm) | Coating | # available now1/soon2 | Article Number (WebShop) | |
---|---|---|---|---|---|---|---|---|---|---|---|
Prime | Si + Si3N4 | 4 | (100) | double-side | 200 ± 10 | Boron | 1 - 10 | 60 nm | 58 / 58 | WNA40200105B1314S061 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 200 ± 10 | Boron | 1 - 10 | 200 nm | 2 / 2 | WNA40200105B1314S202 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 260 ± 10 | 10000 - 100000 | 80 nm | 23 / 23 | WNA40260100X1718S081 | ||
Prime | Si + Si3N4 | 4 | (100) | double-side | 380 ± 15 | Boron | 1 - 10 | 70 nm | 46 / 46 | WNA40380155B1314S071 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 380 ± 15 | Boron | 1 - 10 | 150 nm | 44 / 44 | WNA40380155B1314S151 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 380 ± 15 | Boron | 1 - 10 | 400 nm | 18 / 18 | WNA40380155B1314S401 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 380 ± 15 | Boron | 1 - 10 | 1000 nm | 0 / 50 | WNA40380155B1314SXX1 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 525 ± 15 | Boron | 1 - 10 | 100 nm | 119 / 119 | WNA40525155B1314S102 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 525 ± 15 | Boron | 1 - 10 | 500 nm | 0 / 50 | WNA40525155B1314S501 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 525 ± 25 | Boron | 1 - 10 | 40 nm | 6 / 6 | WNA40525255B1314S041 | |
Prime | Si + Si3N4 | 4 | (100) | double-side | 525 ± 25 | Boron | 1 - 10 | 300 nm | 53 / 53 | WNA40525255B1314S301 | |
Prime | Si + Si3N4 | 4 | (100) | one-side | 325 ± 25 | Boron | 1 - 10 | 80 nm | 75 / 75 | WND40325250B1314S081 | |
Prime | Si + Si3N4 | 4 | (100) | one-side | 525 ± 25 | Boron | 1 - 10 | 2000 nm | 14 / 14 | WND40525250B1314SNN1 | |
Dummy3 | Si + Si3N4 | 4 | (100) | double-side | 500 ± 25 | 50 nm | 5 / 5 | WNS40500250X0000S051 |
1available when this list has been revised
2 available + ordered (= available in typically few weeks)
3 Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.
4 prices subject to change; while stocks last.
5 possibly available on demand within approx. 1 - 2 weeks.
We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.