MicroChemicals GmbH

MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 2025-12-05 18:57 MEZ)

Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.com

	1 Inch	2 Inch	3 Inch	4 Inch	5 Inch	6 Inch	8 Inch	12 Inch	Stücke
CZ-Si	5939 Wafer	12068 Wafer	9087 Wafer	21737 Wafer	563 Wafer	18071 Wafer	6224 Wafer	775 Wafer	2772 Wafer
FZ-Si	450 Wafer	1153 Wafer	903 Wafer	3036 Wafer	0 Wafer	540 Wafer	0 Wafer	0 Wafer	0 Wafer
Si+SiO2	3424 Wafer	1574 Wafer	1143 Wafer	5044 Wafer	0 Wafer	567 Wafer	0 Wafer	0 Wafer	1302 Wafer
Si+SiNx	0 Wafer	0 Wafer	133 Wafer	465 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer
Quartz	50 Wafer	89 Wafer	134 Wafer	330 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	278 Wafer
Fused Silica	3133 Wafer	4566 Wafer	732 Wafer	2440 Wafer	0 Wafer	450 Wafer	2 Wafer	0 Wafer	16135 Wafer
Glass	400 Wafer	1238 Wafer	593 Wafer	2134 Wafer	0 Wafer	524 Wafer	40 Wafer	0 Wafer	3042 Wafer

4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)

Qual.	Material	Size (inch)	Orien- tation	Polished	Thick- ness (μm)	Doping	Resistivity (ohm cm)	Coating	# available now¹/soon²	Article Number (WebShop)
Prime	Si + Si₃N₄	4	(100)	double-side	100 ± 10	Boron	0.001 - 0.01	20 nm	0 / 13	WNA40100105B1011S021
Prime	Si + Si₃N₄	4	(100)	double-side	200 ± 10	Boron	1 - 10	20 nm	0 / 12	WNA40200105B1314S021
Prime	Si + Si₃N₄	4	(100)	double-side	200 ± 10	Boron	1 - 10	60 nm	53 / 53	WNA40200105B1314S061
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	70 nm	30 / 30	WNA40380155B1314S071
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	150 nm	25 / 25	WNA40380155B1314S151
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	400 nm	19 / 19	WNA40380155B1314S401
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	1000 nm	34 / 34	WNA40380155B1314SXX1
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 15	Boron	1 - 10	100 nm	93 / 93	WNA40525155B1314S102
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 15	Boron	1 - 10	500 nm	64 / 64	WNA40525155B1314S501
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 15	Boron	1 - 10	2000 nm	5 / 5	WNA40525155B1314SNN1
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 25	Boron	1 - 10	300 nm	35 / 35	WNA40525255B1314S301
Prime	Si + Si₃N₄	4	(100)	one-side	325 ± 25	Boron	1 - 10	80 nm	69 / 69	WND40325250B1314S081
Prime	Si + Si₃N₄	4	(100)	one-side	525 ± 25	Boron	1 - 10	2000 nm	9 / 9	WND40525250B1314SNN1
Dummy³	Si + Si₃N₄	4	(100)	double-side	500 ± 25			50 nm	4 / 4	WNS40500250X0000S051

Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com

¹available when this list has been revised

² available + ordered (= available in typically few weeks)

³ Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.

⁴ prices subject to change; while stocks last.

⁵ possibly available on demand within approx. 1 - 2 weeks.

We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.