MicroChemicals GmbH

MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 2026-03-19 17:47 MEZ)

Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.com

	1 Inch	2 Inch	3 Inch	4 Inch	5 Inch	6 Inch	8 Inch	12 Inch	Stücke
CZ-Si	5214 Wafer	10199 Wafer	11822 Wafer	21956 Wafer	538 Wafer	17912 Wafer	7702 Wafer	675 Wafer	8976 Wafer
FZ-Si	450 Wafer	1147 Wafer	877 Wafer	3352 Wafer	0 Wafer	510 Wafer	0 Wafer	0 Wafer	0 Wafer
Si+SiO2	3299 Wafer	1622 Wafer	1988 Wafer	6927 Wafer	0 Wafer	792 Wafer	0 Wafer	0 Wafer	1032 Wafer
Si+SiNx	0 Wafer	0 Wafer	136 Wafer	529 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer
Quartz	175 Wafer	64 Wafer	167 Wafer	432 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	404 Wafer
Fused Silica	3456 Wafer	4182 Wafer	974 Wafer	2497 Wafer	0 Wafer	526 Wafer	69 Wafer	0 Wafer	20075 Wafer
Glass	600 Wafer	1653 Wafer	589 Wafer	2507 Wafer	0 Wafer	447 Wafer	131 Wafer	0 Wafer	3326 Wafer

4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)

Qual.	Material	Size (inch)	Orien- tation	Polished	Thick- ness (μm)	Doping	Resistivity (ohm cm)	Coating	# available now¹/soon²	Article Number (WebShop)
Prime	Si + Si₃N₄	4	(100)	double-side	100 ± 10	Boron	0.001 - 0.01	20 nm	0 / 13	WNA40100105B1011S021
Prime	Si + Si₃N₄	4	(100)	double-side	200 ± 10	Boron	1 - 10	20 nm	0 / 12	WNA40200105B1314S021
Prime	Si + Si₃N₄	4	(100)	double-side	200 ± 10	Boron	1 - 10	60 nm	53 / 53	WNA40200105B1314S061
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	70 nm	18 / 43	WNA40380155B1314S071
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	150 nm	70 / 70	WNA40380155B1314S151
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	400 nm	17 / 17	WNA40380155B1314S401
Prime	Si + Si₃N₄	4	(100)	double-side	380 ± 15	Boron	1 - 10	1000 nm	14 / 64	WNA40380155B1314SXX1
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 15	Boron	1 - 10	100 nm	73 / 73	WNA40525155B1314S102
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 15	Boron	1 - 10	500 nm	62 / 62	WNA40525155B1314S501
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 15	Boron	1 - 10	2000 nm	5 / 5	WNA40525155B1314SNN1
Prime	Si + Si₃N₄	4	(100)	double-side	525 ± 25	Boron	1 - 10	300 nm	72 / 72	WNA40525255B1314S301
Prime	Si + Si₃N₄	4	(100)	one-side	325 ± 25	Boron	1 - 10	80 nm	37 / 37	WND40325250B1314S081
Prime	Si + Si₃N₄	4	(100)	one-side	525 ± 25	Boron	1 - 10	2000 nm	6 / 6	WND40525250B1314SNN1
Dummy³	Si + Si₃N₄	4	(100)	double-side	500 ± 25			50 nm	2 / 2	WNS40500250X0000S051

Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com

¹available when this list has been revised

² available + ordered (= available in typically few weeks)

³ Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.

⁴ prices subject to change; while stocks last.

⁵ possibly available on demand within approx. 1 - 2 weeks.

We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.