MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 31.03.2023 19:34 MEZ)


Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.eu
       
 1 Inch2 Inch3 Inch4 Inch5 Inch6 Inch8 Inch12 InchStücke
CZ-Si3630 Wafer8701 Wafer12307 Wafer16259 Wafer744 Wafer13779 Wafer3555 Wafer600 Wafer4079 Wafer
FZ-Si0 Wafer693 Wafer677 Wafer2522 Wafer0 Wafer396 Wafer0 Wafer0 Wafer0 Wafer
Si+SiO20 Wafer1141 Wafer935 Wafer3605 Wafer0 Wafer603 Wafer0 Wafer0 Wafer1476 Wafer
Si+SiNx0 Wafer0 Wafer152 Wafer565 Wafer0 Wafer0 Wafer0 Wafer0 Wafer0 Wafer
Quartz200 Wafer60 Wafer187 Wafer212 Wafer0 Wafer0 Wafer0 Wafer0 Wafer195 Wafer
Fused Silica425 Wafer4735 Wafer742 Wafer1884 Wafer0 Wafer519 Wafer49 Wafer0 Wafer18525 Wafer
Glass400 Wafer1805 Wafer364 Wafer2129 Wafer0 Wafer449 Wafer72 Wafer0 Wafer3122 Wafer

4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)
Qual.MaterialSize
(inch)
Orien-
tation
PolishedThick-
ness (μm)
DopingResistivity
(ohm cm)
Coating# available
now1/soon2
Article Number
(WebShop)
 
PrimeSi + Si3N44(100)double-side200 ± 10Boron1 - 1060 nm50 / 50WNA40200105B1314S061
Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 60 nm low-stress LPCVD Si3N4 (50 - 70 nm)
Price/wafer (net): € 64.00 (5 wafers), € 58.00 (10 wafers), € 50.00 (25 wafers), € 48.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side200 ± 10Boron1 - 10200 nm0 / 25WNA40200105B1314S202
Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 200 nm low-stress LPCVD Si3N4 on both sides
Price/wafer (net): € 68.00 (5 wafers), € 62.00 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side260 ± 1010000 - 10000080 nm24 / 24WNA40260100X1718S081
Prime FZ-Si + Si3N4 wafer 4 inch, thickness = 260 ± 10 μm, (100), 2-side polished, TTV < 10 μm, Bow/Warp < 30 μm, intrinsic/undoped, 10000 - 100000 Ohm cm, 80 +/- 20 nm (> 50 nm) LPCVD low-stress Si3N4 on both sides
Price/wafer (net): € 74.00 (5 wafers), € 66.00 (10 wafers), € 62.00 (25 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side380 ± 15Boron1 - 1050 nm14 / 14WNA40380155B1314S051
Prime Si + Si3N4 (low-stress) wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron). TTV < 5 μm, 1 - 10 Ohm cm, 50 nm low-stress LPCVD Si3N4 on both sides
Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side380 ± 15Boron1 - 1070 nm25 / 25WNA40380155B1314S071
Prime Si + LPCVD Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 75 nm Si3N4
Price/wafer (net): € 57.00 (5 wafers), € 52.00 (10 wafers), € 46.00 (25 wafers), € 44.50 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side380 ± 15Boron1 - 10150 nm25 / 25WNA40380155B1314S151
Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 145 nm LPCVD Si3N4 on both sides
Price/wafer (net): € 52.00 (5 wafers), € 46.00 (10 wafers), € 40.00 (25 wafers), € 38.00 (50 wafers), € 37.00 (100 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side380 ± 15Boron1 - 10300 nm14 / 14WNA40380155B1314S302
Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 300 nm low-stress LPCVD Si3N4 on both sides
Price/wafer (net): € 52.00 (5 wafers), € 46.00 (10 wafers), € 40.00 (25 wafers), € 38.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side380 ± 15Boron1 - 10400 nm24 / 24WNA40380155B1314S401
Prime Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 400 nm LPCVD low-stress Si3N4 on both sides
Price/wafer (net): € 58.00 (5 wafers), € 52.00 (10 wafers), € 46.00 (25 wafers), € 44.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side380 ± 15Boron1 - 101000 nm8 / 58WNA40380155B1314SXX1
Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm LPCVD low-stress Si3N4 on both sides
Price/wafer (net): € 83.00 (5 wafers), € 78.00 (10 wafers), € 72.00 (25 wafers), € 70.00 (50 wafers), € 68.00 (100 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side525 ± 15Boron1 - 1030 nm9 / 9WNA40525155B1314S031
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 30 nm low-stress LPCVD Si3N4 on both wafer sides
Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side525 ± 15Boron1 - 10100 nm50 / 50WNA40525155B1314S102
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 100 nm low-stress LPCVD Si3N4 on both sides
Price/wafer (net): € 52.00 (5 wafers), € 45.00 (10 wafers), € 38.00 (25 wafers), € 36.00 (50 wafers), € 34.00 (100 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side525 ± 15Boron1 - 10500 nm0 / 15WNA40525155B1314S501
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 500 nm low-stress LPCVD Si3N4 on both sides
Price/wafer (net): € 66.00 (5 wafers), € 59.00 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side525 ± 25Boron1 - 1040 nm11 / 11WNA40525255B1314S041
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 40 nm low-stress Si3N4
Price/wafer (net): € 54.20 (5 wafers), € 48.60 (10 wafers), € 43.00 (25 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side525 ± 25Boron1 - 10150 nm35 / 35WNA40525255B1314S152
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 145 nm LPCVD Si3N4 on both sides !! few particles or defects underneath the nitride film visisble using a wafer inspection lamp !!
Price/wafer (net): € 39.00 (5 wafers), € 33.00 (10 wafers), € 27.00 (25 wafers), € 25.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side525 ± 25Boron1 - 10300 nm47 / 47WNA40525255B1314S301
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 300 nm LPCVD Si3N4 on both sides - 1 carrier with 15 wafers has laser-marking on front side
Price/wafer (net): € 56.00 (5 wafers), € 50.00 (10 wafers), € 44.00 (25 wafers), € 42.00 (50 wafers), € 39.00 (100 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)double-side525 ± 25Boron1 - 10450 nm39 / 39WNA40525255B1314S451
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 450 nm low-stress LPCVD Si3N4 on both sides
Price/wafer (net): € 68.00 (5 wafers), € 64.00 (10 wafers), € 58.00 (25 wafers), € 56.00 (50 wafers) (plus packaging / shipping)
 
PrimeSi + Si3N44(100)one-side325 ± 25Boron1 - 1080 nm0 / 75WND40325250B1314S081
Prime Si + Si3N4 wafer 4 inch, thickness = 325 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 80 nm stoichiometric LPCVD Si3N4 on both sides
Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers), € 39.00 (100 wafers) (plus packaging / shipping)
 
Dummy3Si + Si3N44(100)double-side525 ± 15Boron1 - 1040 nm25 / 25WNS40525155B1314S041
Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 45 nm low-stress LPCVD Si3N4 on both wafer sides, ihomogenous appearance (large-scale spots visible, maybe impurities underneath nitride coating)
Price/wafer (net): € 16.00 (25 wafers) (plus packaging / shipping)
Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com
1 available when this list has been revised
2 available + ordered (= available in typically few weeks)
3 Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.
4 prices subject to change; while stocks last.
5 possibly available on demand within approx. 1 - 2 weeks.

 
       
We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.