MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 05.03.2021 18:17 MEZ)
4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)
| Qual. | Material | Size (inch) | Orien- tation | Polished | Thick- ness (μm) | Doping | Resistivity (ohm cm) | Coating | # available now1/soon2 | Article Number (WebShop) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 200 ± 10 | Boron | 1 - 10 | 60 nm | 0 / 25 | WNA40200105B1314S061 | | | | Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 60 nm low-stress LPCVD Si3N4 (50 - 70 nm) | | | Price/wafer (net): € 52.00 (25 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 200 ± 10 | Boron | 1 - 10 | 100 nm | 12 / 12 | WNA40200105B1314S101 | | | | Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 100 nm low-stress Si3N4 on both sides | | | Price/wafer (net): € 63.20 (5 wafers), € 57.60 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 200 ± 10 | Boron | 1 - 10 | 300 nm | 6 / 6 | WNA40200105B1314S301 | | | | Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 300 nm low-stress Si3N4 on both sides | | | Price/wafer (net): € 63.20 (5 wafers), € 57.60 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 380 ± 15 | Boron | 1 - 10 | 50 nm | 25 / 25 | WNA40380155B1314S051 | | | | Prime Si + Si3N4 (low-stress) wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron). TTV < 5 μm, 1 - 10 Ohm cm, 50 nm low-stress LPCVD Si3N4 on both sides | | | Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 380 ± 15 | Boron | 1 - 10 | 150 nm | 50 / 50 | WNA40380155B1314S151 | | | | Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 145 nm LPCVD Si3N4 on both sides | | | Price/wafer (net): € 47.20 (5 wafers), € 41.60 (10 wafers), € 36.00 (25 wafers), € 34.00 (50 wafers), € 33.00 (100 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 380 ± 15 | Boron | 1 - 10 | 1000 nm | 25 / 25 | WNA40380155B1314SXX1 | | | | Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm LPCVD low-stress Si3N4 on both sides | | | Price/wafer (net): € 75.20 (5 wafers), € 69.60 (10 wafers), € 64.00 (25 wafers), € 62.00 (50 wafers), € 60.00 (100 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 525 ± 15 | Boron | 1 - 10 | 30 nm | 10 / 10 | WNA40525155B1314S031 | | | | Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 30 nm low-stress LPCVD Si3N4 on both wafer sides | | | Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + Si3N4 | 4 | (100) | double-side | 525 ± 25 | Boron | 1 - 10 | 40 nm | 14 / 14 | WNA40525255B1314S041 | | | | Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 40 nm low-stress Si3N4 | | | Price/wafer (net): € 54.20 (5 wafers), € 48.60 (10 wafers), € 43.00 (25 wafers) (plus packaging / shipping) | |
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| Dummy3 | Si + Si3N4 | 4 | (100) | double-side | 525 ± 15 | Boron | 1 - 10 | 40 nm | 25 / 25 | WNS40525155B1314S041 | | | | Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 45 nm low-stress LPCVD Si3N4 on both wafer sides, ihomogenous appearance (large-scale spots visible, maybe impurities underneath nitride coating) | | | Price/wafer (net): € 16.00 (25 wafers) (plus packaging / shipping) | |
Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com
1 available when this list has been revised 2 available + ordered (= available in typically few weeks) 3 Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes. 4 prices subject to change; while stocks last. 5 possibly available on demand within approx. 1 - 2 weeks. We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.
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