MicroChemicals GmbH

MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 15.10.2024 19:46 MEZ)

Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.com

	1 Inch	2 Inch	3 Inch	4 Inch	5 Inch	6 Inch	8 Inch	12 Inch	Stücke
CZ-Si	4389 Wafer	8641 Wafer	10319 Wafer	20148 Wafer	714 Wafer	12852 Wafer	5964 Wafer	849 Wafer	2650 Wafer
FZ-Si	0 Wafer	1076 Wafer	720 Wafer	2801 Wafer	0 Wafer	600 Wafer	0 Wafer	0 Wafer	0 Wafer
Si+SiO2	2999 Wafer	1219 Wafer	968 Wafer	3942 Wafer	0 Wafer	328 Wafer	0 Wafer	0 Wafer	1477 Wafer
Si+SiNx	0 Wafer	0 Wafer	98 Wafer	509 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer
Quartz	200 Wafer	124 Wafer	179 Wafer	234 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	153 Wafer
Fused Silica	1151 Wafer	4647 Wafer	461 Wafer	1735 Wafer	0 Wafer	489 Wafer	24 Wafer	0 Wafer	15772 Wafer
Glass	200 Wafer	1928 Wafer	749 Wafer	2561 Wafer	0 Wafer	572 Wafer	55 Wafer	0 Wafer	3231 Wafer

4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)

Hide details and prices

Qual.

Material

Size
(inch)

Orien-
tation

Polished

Thick-
ness (μm)

Doping

Resistivity
(ohm cm)

Coating

# available
now¹/soon²

Article Number
(WebShop)

Prime

Si + Si₃N₄

(100)

double-side

200 ± 10

Boron

1 - 10

60 nm

69 / 69

WNA40200105B1314S061

Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 60 nm low-stress LPCVD Si3N4 (50 - 70 nm)

Price/wafer (net): € 64.00 (5 wafers), € 58.00 (10 wafers), € 50.00 (25 wafers), € 48.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

200 ± 10

Boron

1 - 10

200 nm

9 / 9

WNA40200105B1314S202

Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 200 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 68.00 (5 wafers), € 62.00 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

260 ± 10

10000 - 100000

80 nm

23 / 23

WNA40260100X1718S081

Prime FZ-Si + Si3N4 wafer 4 inch, thickness = 260 ± 10 μm, (100), 2-side polished, TTV < 10 μm, Bow/Warp < 30 μm, intrinsic/undoped, 10000 - 100000 Ohm cm, 80 +/- 20 nm (> 50 nm) LPCVD low-stress Si3N4 on both sides

Price/wafer (net): € 74.00 (5 wafers), € 66.00 (10 wafers), € 62.00 (25 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

50 nm

7 / 7

WNA40380155B1314S051

Prime Si + Si3N4 (low-stress) wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron). TTV < 5 μm, 1 - 10 Ohm cm, 50 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

70 nm

48 / 48

WNA40380155B1314S071

Prime Si + LPCVD Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 75 nm Si3N4

Price/wafer (net): € 57.00 (5 wafers), € 52.00 (10 wafers), € 46.00 (25 wafers), € 44.50 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

150 nm

44 / 44

WNA40380155B1314S151

Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 145 nm LPCVD Si3N4 on both sides

Price/wafer (net): € 52.00 (5 wafers), € 46.00 (10 wafers), € 40.00 (25 wafers), € 38.00 (50 wafers), € 37.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

400 nm

18 / 18

WNA40380155B1314S401

Prime Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 400 nm LPCVD low-stress Si3N4 on both sides

Price/wafer (net): € 58.00 (5 wafers), € 52.00 (10 wafers), € 46.00 (25 wafers), € 44.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

1000 nm

28 / 28

WNA40380155B1314SXX1

Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm LPCVD low-stress Si3N4 on both sides

Price/wafer (net): € 83.00 (5 wafers), € 78.00 (10 wafers), € 72.00 (25 wafers), € 70.00 (50 wafers), € 68.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

30 nm

6 / 6

WNA40525155B1314S031

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 30 nm low-stress LPCVD Si3N4 on both wafer sides

Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

100 nm

75 / 75

WNA40525155B1314S102

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 100 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 52.00 (5 wafers), € 45.00 (10 wafers), € 38.00 (25 wafers), € 36.00 (50 wafers), € 34.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

500 nm

57 / 57

WNA40525155B1314S501

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 500 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 66.00 (5 wafers), € 59.00 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 25

Boron

1 - 10

40 nm

11 / 11

WNA40525255B1314S041

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 40 nm low-stress Si3N4

Price/wafer (net): € 54.20 (5 wafers), € 48.60 (10 wafers), € 43.00 (25 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 25

Boron

1 - 10

300 nm

55 / 55

WNA40525255B1314S301

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 300 nm LPCVD Si3N4 on both sides

Price/wafer (net): € 56.00 (5 wafers), € 50.00 (10 wafers), € 44.00 (25 wafers), € 42.00 (50 wafers), € 39.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 25

Boron

1 - 10

450 nm

9 / 9

WNA40525255B1314S451

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 450 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 68.00 (5 wafers), € 64.00 (10 wafers), € 58.00 (25 wafers), € 56.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

one-side

325 ± 25

Boron

1 - 10

80 nm

25 / 25

WND40325250B1314S081

Prime Si + Si3N4 wafer 4 inch, thickness = 325 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 80 nm stoichiometric LPCVD Si3N4 on both sides

Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers), € 39.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

one-side

525 ± 25

Boron

1 - 10

2000 nm

15 / 15

WND40525250B1314SNN1

Prime Si + dry/wet/dry SiO2 + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron), 1 - 10 Ohm cm, 2000 nm SiO2 + 300 nm stoichiometric LPCVD Si3N4 on both sides

Price/wafer (net): € 110.00 (10 wafers) (plus packaging / shipping)

Dummy³

Si + Si₃N₄

(100)

double-side

500 ± 25

50 nm

10 / 10

WNS40500250X0000S051

Fused Silica JGS2 + Si3N4 wafer 4 inch, thickness = 500 ± 25 μm, (100), 2-side polished, + 50 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 62.00 (5 wafers), € 54.00 (10 wafers), € 46.00 (25 wafers), € 44.00 (50 wafers) (plus packaging / shipping)

Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com

¹ available when this list has been revised
² available + ordered (= available in typically few weeks)
³ Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.
⁴ prices subject to change; while stocks last.
⁵ possibly available on demand within approx. 1 - 2 weeks.

We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.