Silicon, Quartz, Glass and Fused Silica Wafer

MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 15.06.2021 19:26 MEZ)

Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.eu

	1 Inch	2 Inch	3 Inch	4 Inch	5 Inch	6 Inch	8 Inch	12 Inch	Stücke
CZ-Si	1275 Wafer	6034 Wafer	8438 Wafer	9917 Wafer	350 Wafer	11114 Wafer	1268 Wafer	450 Wafer	3700 Wafer
FZ-Si	0 Wafer	650 Wafer	641 Wafer	2631 Wafer	0 Wafer	436 Wafer	0 Wafer	0 Wafer	0 Wafer
Si+SiO2	0 Wafer	1105 Wafer	547 Wafer	2421 Wafer	0 Wafer	483 Wafer	0 Wafer	0 Wafer	1512 Wafer
Si+SiNx	0 Wafer	0 Wafer	181 Wafer	372 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer
Quartz	300 Wafer	208 Wafer	121 Wafer	180 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	198 Wafer
Fused Silica	450 Wafer	1654 Wafer	140 Wafer	1545 Wafer	0 Wafer	332 Wafer	0 Wafer	0 Wafer	16118 Wafer
Glass	500 Wafer	1480 Wafer	604 Wafer	1777 Wafer	0 Wafer	424 Wafer	0 Wafer	0 Wafer	3022 Wafer

4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)

Hide details and prices

Qual.

Material

Size
(inch)

Orien-
tation

Polished

Thick-
ness (μm)

Doping

Resistivity
(ohm cm)

Coating

# available
now¹/soon²

Article Number
(WebShop)

Prime

Si + Si₃N₄

(100)

double-side

200 ± 10

Boron

1 - 10

60 nm

25 / 25

WNA40200105B1314S061

Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 60 nm low-stress LPCVD Si3N4 (50 - 70 nm)

Price/wafer (net): € 52.00 (25 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

200 ± 10

Boron

1 - 10

100 nm

12 / 12

WNA40200105B1314S101

Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 100 nm low-stress Si3N4 on both sides

Price/wafer (net): € 63.20 (5 wafers), € 57.60 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

200 ± 10

Boron

1 - 10

300 nm

6 / 6

WNA40200105B1314S301

Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 300 nm low-stress Si3N4 on both sides

Price/wafer (net): € 63.20 (5 wafers), € 57.60 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

50 nm

25 / 25

WNA40380155B1314S051

Prime Si + Si3N4 (low-stress) wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron). TTV < 5 μm, 1 - 10 Ohm cm, 50 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

70 nm

0 / 25

WNA40380155B1314S071

Prime Si + LPCVD Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 75 nm Si3N4

Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.50 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

150 nm

49 / 49

WNA40380155B1314S151

Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 145 nm LPCVD Si3N4 on both sides

Price/wafer (net): € 47.20 (5 wafers), € 41.60 (10 wafers), € 36.00 (25 wafers), € 34.00 (50 wafers), € 33.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

1000 nm

15 / 65

WNA40380155B1314SXX1

Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm LPCVD low-stress Si3N4 on both sides

Price/wafer (net): € 75.20 (5 wafers), € 69.60 (10 wafers), € 64.00 (25 wafers), € 62.00 (50 wafers), € 60.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

30 nm

10 / 10

WNA40525155B1314S031

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 30 nm low-stress LPCVD Si3N4 on both wafer sides

Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

450 nm

16 / 16

WNA40525155B1314S451

Prime Si + LPCVD Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 450 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 63.20 (5 wafers), € 57.60 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 25

Boron

1 - 10

40 nm

14 / 14

WNA40525255B1314S041

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, 40 nm low-stress Si3N4

Price/wafer (net): € 54.20 (5 wafers), € 48.60 (10 wafers), € 43.00 (25 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 25

Boron

1 - 10

150 nm

50 / 50

WNA40525255B1314S152

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 145 nm LPCVD Si3N4 on both sides !! few particles or defects underneath the nitride film visisble using a wafer inspection lamp !!

Price/wafer (net): € 39.00 (5 wafers), € 33.00 (10 wafers), € 27.00 (25 wafers), € 25.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

one-side

325 ± 25

Boron

1 - 10

80 nm

0 / 50

WND40325250B1314S081

Prime Si + Si3N4 wafer 4 inch, thickness = 325 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 80 nm stoichiometric LPCVD Si3N4 on both sides

Price/wafer (net): € 53.20 (5 wafers), € 47.60 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers), € 39.00 (100 wafers) (plus packaging / shipping)

Dummy³

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

40 nm

25 / 25

WNS40525155B1314S041

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 45 nm low-stress LPCVD Si3N4 on both wafer sides, ihomogenous appearance (large-scale spots visible, maybe impurities underneath nitride coating)

Price/wafer (net): € 16.00 (25 wafers) (plus packaging / shipping)

Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com

¹ available when this list has been revised
² available + ordered (= available in typically few weeks)
³ Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.
⁴ prices subject to change; while stocks last.
⁵ possibly available on demand within approx. 1 - 2 weeks.

We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.