Silicon, Quartz, Glass and Fused Silica Wafer

MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 13.12.2019 19:45 MEZ)

Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.eu

	1 Inch	2 Inch	3 Inch	4 Inch	5 Inch	6 Inch	8 Inch	12 Inch	Stücke
CZ-Si	536 Wafer	5770 Wafer	6298 Wafer	11851 Wafer	425 Wafer	9954 Wafer	1775 Wafer	100 Wafer	1567 Wafer
FZ-Si	0 Wafer	607 Wafer	171 Wafer	3013 Wafer	0 Wafer	382 Wafer	0 Wafer	0 Wafer	0 Wafer
Si+SiO2	0 Wafer	610 Wafer	776 Wafer	2417 Wafer	0 Wafer	360 Wafer	0 Wafer	0 Wafer	1700 Wafer
Si+SiNx	0 Wafer	0 Wafer	172 Wafer	245 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer
Quartz	300 Wafer	185 Wafer	53 Wafer	154 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	211 Wafer
Fused Silica	0 Wafer	1310 Wafer	45 Wafer	961 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	9770 Wafer
Glass	100 Wafer	445 Wafer	450 Wafer	1433 Wafer	0 Wafer	284 Wafer	21 Wafer	0 Wafer	3180 Wafer

4 Inch Silicon + SiNx Wafers (Stoichiometric or Low-stress Silicon Nitride)

Hide details and prices

Qual.

Material

Size
(inch)

Orien-
tation

Polished

Thick-
ness (μm)

Doping

Resistivity
(ohm cm)

Coating

# available
now¹/soon²

Article Number
(click for request)

Prime

Si + Si₃N₄

(100)

double-side

200 ± 10

Boron

1 - 10

300 nm

17 / 17

WNA40200105B1314S301

Prime Si + Si3N4 wafer 4 inch, thickness = 200 ± 10 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 300 nm low-stress Si3N4 on both sides

Price/wafer (net): € 60.00 (5 wafers), € 56.00 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

50 nm

15 / 15

WNA40380155B1314S051

Prime Si + Si3N4 (low-stress) wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron). TTV < 5 μm, 1 - 10 Ohm cm, 50 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 50.00 (5 wafers), € 46.00 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

80 nm

15 / 15

WNA40380155B1314S081

Prime Si + LPCVD Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron), TTV < 5 μm, 1 - 10 Ohm cm, ca. 83 nm LPCVD Si3N4 on both sides

Price/wafer (net): € 50.00 (5 wafers), € 46.00 (10 wafers), € 42.00 (25 wafers), € 40.50 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

150 nm

58 / 58

WNA40380155B1314S151

Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 145 nm LPCVD Si3N4 on both sides

Price/wafer (net): € 44.00 (5 wafers), € 40.00 (10 wafers), € 36.00 (25 wafers), € 34.00 (50 wafers), € 33.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

380 ± 15

Boron

1 - 10

1000 nm

23 / 23

WNA40380155B1314SXX1

Prime CZ-Si + Si3N4 wafer 4 inch, thickness = 380 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm LPCVD low-stress Si3N4 on both sides

Price/wafer (net): € 72.00 (5 wafers), € 68.00 (10 wafers), € 64.00 (25 wafers), € 62.00 (50 wafers), € 60.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

30 nm

0 / 15

WNA40525155B1314S031

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 30 nm low-stress LPCVD Si3N4 on both wafer sides

Price/wafer (net): € 50.00 (5 wafers), € 46.00 (10 wafers), € 42.00 (25 wafers), € 40.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

450 nm

5 / 5

WNA40525155B1314S451

Prime Si + LPCVD Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 450 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 60.00 (5 wafers), € 56.00 (10 wafers), € 52.00 (25 wafers), € 50.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 15

Boron

1 - 10

500 nm

58 / 58

WNA40525155B1314S501

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 500 nm low-stress LPCVD Si3N4 on both sides

Price/wafer (net): € 72.00 (5 wafers), € 68.00 (10 wafers), € 64.00 (25 wafers), € 62.00 (50 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 25

Boron

1 - 10

70 nm

18 / 18

WNA40525255B1314S071

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 75 nm LPCVD Si3N4 on both sides

Price/wafer (net): € 42.00 (5 wafers), € 38.00 (10 wafers), € 34.00 (25 wafers), € 32.00 (50 wafers), € 31.00 (100 wafers) (plus packaging / shipping)

Prime

Si + Si₃N₄

(100)

double-side

525 ± 25

Boron

1 - 10

300 nm

21 / 21

WNA40525255B1314S301

Prime Si + Si3N4 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, p-type (Boron) TTV < 5 μm, 1 - 10 Ohm cm, 300 nm LPCVD Si3N4 on both sides

Price/wafer (net): € 48.00 (5 wafers), € 44.00 (10 wafers), € 40.00 (25 wafers), € 38.00 (50 wafers), € 37.00 (100 wafers) (plus packaging / shipping)

Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com

¹ available when this list has been revised
² available + ordered (= available in typically few weeks)
³ Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.
⁴ prices subject to change; while stocks last.
⁵ possibly available on demand within approx. 1 - 2 weeks.

We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.