MicroChemicals GmbH

MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 21.10.2024 17:07 MEZ)

Other wafer types (also cut wafer pieces) and technical details on request: info@microchemicals.com

	1 Inch	2 Inch	3 Inch	4 Inch	5 Inch	6 Inch	8 Inch	12 Inch	Stücke
CZ-Si	4385 Wafer	8491 Wafer	10319 Wafer	19956 Wafer	714 Wafer	12852 Wafer	6964 Wafer	849 Wafer	2650 Wafer
FZ-Si	0 Wafer	1076 Wafer	720 Wafer	3062 Wafer	0 Wafer	600 Wafer	0 Wafer	0 Wafer	0 Wafer
Si+SiO2	2999 Wafer	1219 Wafer	917 Wafer	3822 Wafer	0 Wafer	328 Wafer	0 Wafer	0 Wafer	1477 Wafer
Si+SiNx	0 Wafer	0 Wafer	98 Wafer	484 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer
Quartz	200 Wafer	119 Wafer	174 Wafer	234 Wafer	0 Wafer	0 Wafer	0 Wafer	0 Wafer	153 Wafer
Fused Silica	1151 Wafer	4647 Wafer	461 Wafer	1735 Wafer	0 Wafer	489 Wafer	24 Wafer	0 Wafer	15772 Wafer
Glass	200 Wafer	1928 Wafer	749 Wafer	2445 Wafer	0 Wafer	572 Wafer	55 Wafer	0 Wafer	3231 Wafer

4 Inch Silicon + SiO2 Wafers (Thermal Oxidation)

Hide details and prices

Qual.

Material

Size
(inch)

Orien-
tation

Polished

Thick-
ness (μm)

Doping

Resistivity
(ohm cm)

Coating

# available
now¹/soon²

Article Number
(WebShop)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 20

Boron

0.001 - 0.005

290 nm

215 / 215

WTD40525205B1050S291

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 20 μm, (100), 1-side polished, p-type (Boron), TTV < 5 μm, Bow/Warp < 30 μm, 0.001 - 0.005 Ohm cm, 290 nm SiO2 (+/- 7 %), particles: <10 @ 0.5 μm

Price/wafer (net): € 36.00 (5 wafers), € 30.00 (10 wafers), € 23.00 (25 wafers), € 21.50 (50 wafers), € 20.00 (100 wafers), € 19.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 20

Boron

0.001 - 0.005

290 nm

25 / 25

WTD40525205B1050S293

Si + dry SiO2 wafer 4 inch, thickness = 525 ± 20 μm, (100), 1-side polished, p-type (Boron), TTV < 5 μm, Bow/Warp < 30 μm, 0.001 - 0.005 Ohm cm, 290 nm SiO2 (+/- 7 %), !! surface shows some kind of "haze" which can be cleaned !!

Price/wafer (net): on request

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 20

Boron

0.001 - 0.005

290 nm

13 / 13

WTD40525205B1050S294

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 20 μm, (100), 1-side polished, p-type (Boron) TTV < 5 μm, 0.001 - 0.005 Ohm cm, 290 nm SiO2, Metallized: Ti: 10 nm and Pt: 100 nm, small individual defects in the layer possible but not mandatory

Price/wafer (net): on request

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Arsenic

0.001 - 0.005

200 nm

23 / 23

WTD40525250A1050S201

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, n-type (Arsenic) TTV < 10 μm, 0.001 - 0.005 Ohm cm, 200 nm SiO2

Price/wafer (net): € 33.00 (5 wafers), € 27.00 (10 wafers), € 21.00 (25 wafers), € 20.00 (50 wafers), € 19.00 (100 wafers), € 18.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Boron

0.001 - 0.005

90 nm

76 / 76

WTD40525250B1050S091

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 0.001 - 0.005 Ohm cm, 90 nm SiO2 +/- 20 %, laser marking on polished side (MCPHD002-XXX, XXX = 001-999)

Price/wafer (net): € 36.00 (5 wafers), € 30.00 (10 wafers), € 23.50 (25 wafers), € 22.00 (50 wafers), € 20.00 (150 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Boron

0.001 - 0.005

280 nm

271 / 271

WTD40525250B1050S281

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 0.001 - 0.005 Ohm cm, 285 nm SiO2 +/- 5 %, laser marking on polished side (MCPHD004-XXX, XXX = 001-999)

Price/wafer (net): € 37.00 (5 wafers), € 31.00 (10 wafers), € 24.50 (25 wafers), € 23.00 (50 wafers), € 21.00 (150 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Boron

1 - 10

100 nm

220 / 220

WTD40525250B1314S102

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 100 nm SiO2

Price/wafer (net): € 33.20 (5 wafers), € 27.60 (10 wafers), € 22.00 (25 wafers), € 20.00 (50 wafers), € 19.00 (100 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Boron

1 - 10

200 nm

401 / 401

WTD40525250B1314S201

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 200 nm SiO2

Price/wafer (net): € 32.00 (5 wafers), € 26.00 (10 wafers), € 20.00 (25 wafers), € 19.00 (50 wafers), € 18.00 (100 wafers), € 17.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Phosphor

1 - 10

100 nm

74 / 74

WTD40525250P1314S101

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, n-type (Phosphor) TTV < 10 μm, 1 - 10 Ohm cm, 100 nm SiO2

Price/wafer (net): € 32.00 (5 wafers), € 26.00 (10 wafers), € 20.00 (25 wafers), € 19.00 (50 wafers), € 18.00 (100 wafers), € 17.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Boron

0.001 - 0.01

90 nm

103 / 103

WTD40525255B1011S091

Prime Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 5 μm, 0.001 - 0.01 Ohm cm, 90 nm SiO2

Price/wafer (net): € 34.00 (5 wafers), € 28.00 (10 wafers), € 22.00 (25 wafers), € 21.00 (50 wafers), € 20.00 (100 wafers), € 19.50 (150 wafers) (plus packaging / shipping)

Test

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Boron

0.001 - 0.005

280 nm

25 / 25

WTM40525250B1050S281

Test Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 0.001 - 0.005 Ohm cm, 285 nm SiO2 +/- 10 %, laser marking on polished side (MCPHD003-XXX, XXX = 001-999), box has already been opened in clean room for SiO2 thickness measurements

Price/wafer (net): on request

Dummy³

Si + SiO₂ (dry)

(100)

one-side

525 ± 25

Boron

0.001 - 0.005

280 nm

234 / 234

WTV40525250B1050S281

Dummy Si + dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 0.001 - 0.005 Ohm cm, 285 nm SiO2 +/- 5 %, laser marking on polished side (MCPHD003-XXX, XXX = 001-999), not-particle-specified, tiny defects in the SiO2 film

Price/wafer (net): € 20.00 (25 wafers), € 18.00 (50 wafers), € 16.00 (100 wafers), € 14.00 (200 wafers) (plus packaging / shipping). One carrier with 9 wafer is also available.

Prime

Si + SiO₂ (wet)

(100)

double-side

525 ± 15

Boron

1 - 10

300 nm

65 / 65

WWA40525150B1314SNN2

Prime Si + dry/wet/dry SiO2 wafer 4 inch, thickness = 525 ± 15 μm, (100), 2-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 300 nm SiO2

Price/wafer (net): € 35.20 (5 wafers), € 29.60 (10 wafers), € 24.00 (25 wafers), € 23.00 (50 wafers), € 22.00 (100 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

double-side

525 ± 25

Phosphor

1 - 10

5000 nm

117 / 117

WWA40525250P1314SXX1

Prime Si + wet SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 2-side polished, n-type (Phosphor), 1 - 10 Ohm cm, 5000 nm SiO2

Price/wafer (net): € 83.20 (5 wafers), € 77.60 (10 wafers), € 72.00 (25 wafers), € 60.00 (50 wafers), € 59.00 (100 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Arsenic

0.001 - 0.005

300 nm

175 / 175

WWD40525250A1050S301

Prime Si + dry/wet/dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, n-type (Arsenic), 0.001 - 0.005 Ohm cm, 300 nm SiO2

Price/wafer (net): € 32.20 (5 wafers), € 26.60 (10 wafers), € 21.00 (25 wafers), € 20.00 (50 wafers), € 19.00 (100 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Boron

1 - 10

300 nm

261 / 261

WWD40525250B1314S302

Prime Si + dry/wet/dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 300 nm SiO2

Price/wafer (net): € 32.00 (5 wafers), € 26.00 (10 wafers), € 20.00 (25 wafers), € 19.00 (50 wafers), € 18.00 (100 wafers), € 17.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Boron

1 - 10

500 nm

361 / 361

WWD40525250B1314S501

Prime Si + dry/wet/dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 500 nm SiO2

Price/wafer (net): € 31.20 (5 wafers), € 25.60 (10 wafers), € 20.00 (25 wafers), € 18.00 (50 wafers), € 17.00 (100 wafers), € 16.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Boron

1 - 10

1000 nm

205 / 205

WWD40525250B1314SXX1

Prime Si + SiO2 (dry/wet/dry)-Wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm SiO2

Price/wafer (net): € 37.20 (5 wafers), € 31.60 (10 wafers), € 26.00 (25 wafers), € 24.00 (50 wafers), € 22.00 (100 wafers), € 20.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Boron

1 - 10

1500 nm

243 / 243

WWD40525250B1314SXX3

Prime Si + wet SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron), 1 - 10 Ohm cm, 1500 nm SiO2

Price/wafer (net): € 39.20 (5 wafers), € 33.60 (10 wafers), € 28.00 (25 wafers), € 27.00 (50 wafers), € 26.00 (100 wafers), € 25.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Boron

1 - 10

2000 nm

170 / 170

WWD40525250B1314SXX6

Prime Si + dry/wet/dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron), 1 - 10 Ohm cm, 2000 nm SiO2

Price/wafer (net): € 47.20 (5 wafers), € 41.60 (10 wafers), € 36.00 (25 wafers), € 34.50 (50 wafers), € 33.00 (100 wafers), € 32.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Boron

1 - 10

5000 nm

68 / 68

WWD40525250B1314SXX8

Prime Si + wet SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 5000 nm SiO2

Price/wafer (net): on request

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Phosphor

1 - 10

1000 nm

0 / 200

WWD40525250P1314SXX1

Prime Si + wet SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, n-type (Phosphor), 1 - 10 Ohm cm, 1000 nm SiO2

Price/wafer (net): € 39.20 (5 wafers), € 33.60 (10 wafers), € 28.00 (25 wafers), € 26.00 (50 wafers), € 24.00 (100 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

Phosphor

1 - 10

2280 nm

50 / 50

WWD40525250P1314SXX2

Prime Si + dry/wet/dry SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, n-type (Phosphor), TTV < 10 μm, 1 - 10 Ohm cm, 2280 nm SiO2 +/- 5 %

Price/wafer (net): € 61.00 (5 wafers), € 55.00 (10 wafers), € 49.00 (25 wafers), € 46.00 (50 wafers), € 44.00 (100 wafers), € 42.00 (200 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

525 ± 25

1000 - 100000

300 nm

77 / 77

WWD40525250X1618S301

Prime FZ Si + wet SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (100), 1-side polished, TTV < 10 μm, intrinsic (undoped) 1000 - 100000 Ohm cm, 300 nm thermal SiO2 dry/wet/dry

Price/wafer (net): € 69.20 (5 wafers), € 63.60 (10 wafers), € 58.00 (25 wafers), € 54.00 (50 wafers), € 50.00 (100 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(100)

one-side

625 ± 25

Phosphor

10 - 20

1000 nm

149 / 149

WWD40625250P1424SXX1

Prime Si + dry/wet/dry SiO2 wafer 4 inch, thickness = 625 ± 25 μm, (100), 1-side polished, n-type (Phosphor) TTV < 10 μm, 10 - 20 Ohm cm, 1000 nm SiO2 +/- 10 %, single flat 32,5 +/- 2,5 mm, no second flat

Price/wafer (net): € 38.50 (5 wafers), € 32.50 (10 wafers), € 26.50 (25 wafers), € 24.50 (50 wafers), € 22.50 (100 wafers), € 18.50 (300 wafers) (plus packaging / shipping)

Prime

Si + SiO₂ (wet)

(111)

one-side

525 ± 25

Phosphor

1 - 10

1000 nm

1 / 1

WWF40525250P1314SXX1

Prime Si + wet SiO2 wafer 4 inch, thickness = 525 ± 25 μm, (111), 1-side polished, n-type (Phosphor) TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm SiO2

Price/wafer (net): € 37.20 (5 wafers), € 31.60 (10 wafers), € 26.00 (25 wafers), € 24.00 (50 wafers), € 22.00 (100 wafers) (plus packaging / shipping)

Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com

¹ available when this list has been revised
² available + ordered (= available in typically few weeks)
³ Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.
⁴ prices subject to change; while stocks last.
⁵ possibly available on demand within approx. 1 - 2 weeks.

We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.