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MicroChemicals Silicon, Quartz, Glass and Fused Silica Wafer Stock List (Revised: 08.04.2020 19:26 MEZ)
3 Inch Silicon + SiO2 Wafers (Thermal Oxidation)
| Qual. | Material | Size
(inch) | Orien-
tation | Polished | Thick-
ness (μm) | Doping | Resistivity
(ohm cm) | Coating | # available
now1/soon2 | Article Number
(click for request) | |
| |
| Prime | Si + SiO2 (dry) | 3 | (100) | one-side | 200 ± 25 | Boron | 1 - 10 | 300 nm | 62 / 62 | WTD30200250B1314S301 | | | | Prime Si + dry SiO2 wafer 3 inch, thickness = 200 ± 25 μm, (100), 1-side polished, p-type (Boron), 1 - 10 Ohm cm, 300 nm SiO2, 2 SEMI flats | | | Price/wafer (net): € 25.80 (5 wafers), € 21.00 (10 wafers), € 16.00 (25 wafers), € 15.00 (50 wafers), € 14.00 (100 wafers) (plus packaging / shipping) | |
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| Prime | Si + SiO2 (dry) | 3 | (100) | one-side | 380 ± 10 | | 5000 - 50000 | 200 nm | 25 / 25 | WTD30380100X5617S201 | | | | Prime Si + dry SiO2 wafer 3 inch, thickness = 380 ± 10 μm, (100), 1-side polished, intrinsic (undoped), 5000 - 50000 Ohm cm, 200 nm thermal dry SiO2 | | | Price/wafer (net): € 49.80 (5 wafers), € 45.00 (10 wafers), € 39.50 (25 wafers), € 36.00 (50 wafers), € 35.00 (100 wafers) (plus packaging / shipping) | |
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| Prime | Si + SiO2 (dry) | 3 | (100) | one-side | 380 ± 25 | Boron | 1 - 10 | 100 nm | 89 / 289 | WTD30380250B1314S101 | | | | Prime Si + dry SiO2 wafer 3 inch, thickness = 380 ± 25 μm, (100), 1-side polished, p-type (Boron) TTV < 10 μm, 1 - 10 Ohm cm, 100 nm SiO2, 1 Flat | | | Price/wafer (net): € 24.80 (5 wafers), € 20.00 (10 wafers), € 15.00 (25 wafers), € 14.00 (50 wafers), € 13.50 (100 wafers), € 13.00 (300 wafers) (plus packaging / shipping) | |
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| Dummy3 | Si + SiO2 (dry) | 3 | (100) | one-side | 380 ± 25 | Boron | 1 - 10 | 100 nm | 75 / 75 | WTV30380250B1314S101 | | | | Dummy Si + dry SiO2 wafer 3 inch, thickness = 380 ± 25 μm, (100), 1-side polished, p-type (Boron), 1 - 10 Ohm cm, 100 nm SiO2, local irregular inhomogeneities of the SiO2 thickness | | | Price/wafer (net): € 12.00 (25 wafers), € 11.00 (50 wafers), € 10.00 (75 wafers) (plus packaging / shipping) | |
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| Prime | Si + SiO2 (wet) | 3 | (100) | one-side | 380 ± 25 | Boron | 1 - 10 | 90 nm | 50 / 50 | WWD30380250B1314S091 | | | | Prime Si + SiO2 wafer 3 inch, thickness = 380 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 90 nm SiO2, 1 SEMI flat | | | Price/wafer (net): € 24.80 (5 wafers), € 20.00 (10 wafers), € 15.00 (25 wafers), € 14.00 (50 wafers) (plus packaging / shipping) | |
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| Prime | Si + SiO2 (wet) | 3 | (100) | one-side | 380 ± 25 | Boron | 1 - 10 | 90 nm | 25 / 25 | WWD30380250B1314S092 | | | | Dummy Si + SiO2 wafer 3 inch, thickness = 380 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 90 nm SiO2, 1 SEMI flat, not particle-specified | | | Price/wafer (net): € 10.00 (25 wafers) (plus packaging / shipping) | |
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| Prime | Si + SiO2 (wet) | 3 | (100) | one-side | 380 ± 25 | Boron | 1 - 10 | 300 nm | 120 / 120 | WWD30380250B1314S301 | | | | Prime Si + wet SiO2 wafer 3 inch, thickness = 380 ± 25 μm, (100), 1-side polished, p-type (Boron), 1 - 10 Ohm cm, 300 nm SiO2 | | | Price/wafer (net): € 24.80 (5 wafers), € 20.00 (10 wafers), € 15.00 (25 wafers), € 13.60 (50 wafers), € 13.20 (100 wafers), € 12.80 (250 wafers) (plus packaging / shipping) | |
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| Prime | Si + SiO2 (wet) | 3 | (100) | one-side | 380 ± 25 | Boron | 1 - 10 | 1000 nm | 150 / 150 | WWD30380250B1314SXX1 | | | | Prime Si + dry/wet/dry SiO2 wafer 3 inch, thickness = 380 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 1000 nm SiO2, 1 SEMI flat | | | Price/wafer (net): € 27.30 (5 wafers), € 22.50 (10 wafers), € 17.50 (25 wafers), € 16.50 (50 wafers), € 15.50 (100 wafers), € 14.50 (150 wafers) (plus packaging / shipping) | |
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| Prime | Si + SiO2 (wet) | 3 | (100) | one-side | 381 ± 25 | Boron | 1 - 10 | 3000 nm | 70 / 70 | WWD30381250B1314SXX1 | | | | Prime Si + wet SiO2 wafer 3 inch, thickness = 381 ± 25 μm, (100), 1-side polished, p-type (Boron), TTV < 10 μm, 1 - 10 Ohm cm, 3000 nm SiO2 | | | Price/wafer (net): € 41.80 (5 wafers), € 37.00 (10 wafers), € 32.00 (25 wafers), € 28.00 (50 wafers), € 26.00 (100 wafers), € 25.00 (200 wafers) (plus packaging / shipping) | |
Interested in an offer? Please send us an e-mail with the article numbers(s) (20-digit code in the right column of the table above) and number to info@microchemicals.com
1 available when this list has been revised
2 available + ordered (= available in typically few weeks)
3 Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.
4 prices subject to change; while stocks last.
5 possibly available on demand within approx. 1 - 2 weeks.
We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.
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